Newport M-ILS150CC Mid-Range Travel Line

Newport M-ILS150CC Mid-Range Travel Linear Stages

Specs at a glance for the M-ILS150CC

• Travel Range: 150 mm
• Minimum Incremental Motion, Linear: 1 µm
• Maximum Speed: 100 mm/s
• Resolution: 0.5 µm
• Load Capacity: 250 N
• On-Axis Accuracy: 5 µm
• On-Axis Accuracy, Typical: 2.5 µm
• Reversal Value (Hysteresis): 1 µm
• Reversal Value (Hysteresis) Typical: 0.4 µm
• Motor: UE404S2
• Origin: Optical, at center of travel
• Uni-directional Repeatability: 1.5 µm
• Pitch: 150 µrad
• Pitch, Typical: 65 µrad
• Yaw: 130 µrad
• Yaw, Typical: 65 µrad
• Roll: 100 µrad
• Normal Load Capacity (Cz): 250 N
• Axial Load Capacity (+Cx): 40 N
• Axial Load Capacity, Inverse (-Cx): 40 N
• Transverse Stiffness, Roll (kax): 15 µrad/Nm
• Longitudinal Stiffness, Pitch (kay): 10 µrad/Nm
• Transverse Stiffness, Yaw (kaz): 10 µrad/Nm
• Off-Center Load Equation (Q): Q ≤ Cz / (1 + D/60)
• MTBF: 20,000 h
• Drive Screw Pitch: 2 mm

Additional Information

• Drive Type: DC Servo
• Thread Type: M6
• Bearings: Double-row recirculating ball bearings
• Drive Mechanism: Backlash-free ball screw
• Limit Switches: Optical
• Motor/Encoder Type: DC servo motor

The M-ILS150CC DC Servo Linear Stage offers a 150 mm travel range and combines fast, sub-micron resolution motion in a highly stiff and robust package. Its extruded aluminum body with Metric threaded holes has been optimized to avoid bending effects caused by the different thermal expansion coefficients of the aluminum body and steel rails.