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Specs at a glance for the ALS130-50
Additional Information
- Maximum Load: 12 kg
- Accuracy HALAR: ±0.3 µm
- Accuracy Standard: ±2.0 µm
- Pitch: 6 arc sec
- Roll: 6 arc sec
- Yaw: 3 arc sec
- Material: Aluminum
The ALS130, with its low profile and outstanding performance characteristics, is the ultimate solution for high-accuracy alignment and inspection stations. For alignment applications, outstanding step-to-step resolution is critical. The ALS130 meets this demand with a resolution of 10 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS130 to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.